High speed biaxial piezoelectric MEMS micromirror with varifocal tunability

High-speed control of light in 3D space is a rapidly advancing field because it enables unique applications in neurobiology, communications, laser micromachining, and augmented/virtual reality. Several technologies have been demonstrated to advance this field, such as complex spatial light modulators (SLMs) and intricate optical systems that independently control in-plane and out-of-plane beam steering. These systems face significant limitations in speed, data handling, and power dissipation, and their bulky optical components hinder integration into other systems. Here, we present a tip-tilt-curvature micro-electro-mechanical systems (MEMS) scanner that overcomes these limitations by combining rapid lateral beam steering with ultra-fast axial focal tuning in a compact form factor of only a few millimeters. The device achieves lateral scan rates exceeding 10 kHz with axial focus modulation over tens of centimeters at operating frequencies exceeding 100 kHz. In benchmarking our device against other tip-tilt-curvature MEMS scanners, the one presented here demonstrates outstanding performance in combining lateral and axial scanning speeds. This performance, along with its compactness, establishes a new scalable architecture for dynamic three-dimensional control of light with high spatiotemporal resolution.