Geometry-Tunable Stretchability and Piezoresistive Response in Growth-Programmable In-Plane Silicon Nanowire Springs

Haotian Wu1, Binfu Liu1, Shuyi Wang2

  • 1Microelectronics Industry Research Institute, School of Physical Science and Technology (Integrated Circuit Science and Engineering), Yangzhou University, Yangzhou, 225009, P. R. China.

Summary

Researchers developed spring-shaped silicon nanowires (SiNWs) for stretchable strain sensors. Geometry programming precisely controls the trade-off between stretchability and sensitivity in these piezoresistive devices.

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