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A Fast f-Ratio Quantification Method for SEM-EDS Based on the XPP Analytical Model and Iterative Algorithms
Jiayi Chen1,2, Haojie Zhu2, Yiling Huang2
1School of Energy and Materials, Shanghai Polytechnic University, Shanghai, China.
Microscopy Research and Technique
|July 25, 2026
Summary
A new fast f-ratio quantification method significantly speeds up scanning electron microscope/energy dispersive spectroscopy (SEM-EDS) analysis by replacing time-consuming Monte Carlo simulations with an analytical model, enabling real-time, high-precision results.
Area of Science:
- Materials Science
- Analytical Chemistry
- Computational Science
Background:
- Scanning Electron Microscope/Energy Dispersive Spectroscopy (SEM-EDS) quantitative analysis is crucial for materials characterization.
- Beam current fluctuations can affect the accuracy of SEM-EDS analysis.
- Current methods, like the f-ratio method, often rely on computationally intensive Monte Carlo (MC) simulations, limiting practical application.
Purpose of the Study:
- To develop a faster and more efficient method for SEM-EDS quantitative analysis.
- To overcome the computational bottleneck associated with traditional f-ratio quantification.
- To enable real-time, high-precision, standardless or standard-limited EDS analysis.
Main Methods:
- Proposed a novel fast f-ratio quantification method.
- Combined the XPP analytical model with a dynamic iterative numerical algorithm.
- Replaced time-consuming MC simulations with the XPP model for theoretical intensity calculations.
Main Results:
- Reduced computation time for theoretical intensities from hours to milliseconds.
- Achieved low quantification errors (0.6%–2.8%) on binary and ternary systems after few iterations.
- Experimental validation on CdSe, InAs, ZnSe, and FeAsS confirmed method accuracy.
Conclusions:
- The proposed method offers a significant advancement in EDS quantitative analysis speed and precision.
- This approach circumvents the need for extensive preset standard databases.
- Provides a new framework for real-time, high-precision standardless or standard-limited EDS quantitative analysis.
