Scalable MoS₂/Si Photodiode Arrays From Roll-to-Roll Mechanical Exfoliation

We present a scalable, all-dry route to MoS₂/Si photodiodes based on high-throughput roll-to-roll mechanical exfoliation. The method yields dense films of large-lateral-size MoS₂ nanosheets and enables the formation of heterojunctions that operate in the photovoltaic regime when transferred onto locally etched Si regions. Individual devices show robust, fast photoresponses and broadband wavelength sensitivity. We further implemented a linear pixel array demonstrating position sensing capability and a 4 × 4 array as a proof-of-concept imaging sensor. These results indicate that roll-to-roll mechanical exfoliation can overcome common limitations of solution-processed films to enable low-cost, self-powered optoelectronic detectors for sensing and imaging applications.