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Light-Activated Luminophores Based on Carbazolyl Oxime Esters for Real-Time Monitoring Photolithographic Processes
Wenjing Wang1, Liming Liu2, Yuchun Yang2
1State Key Laboratory of Chemical Resource Engineering, Beijing Laboratory of Biomedical Materials, College of Materials Science and Engineering, Beijing University of Chemical Technology, Beijing, People's Republic of China.
Chemistry, an Asian Journal
|August 3, 2026
Summary
New photo-activated luminescent materials, oxe02 and oxe03, enable real-time visualization of photolithographic patterns. These novel photoinitiators offer direct pattern quality evaluation, enhancing material science applications.
Area of Science:
- Materials Science
- Photochemistry
- Nanotechnology
Background:
- Photoactivatable luminescent materials are key for information encryption, anti-counterfeiting, and bioimaging.
- Challenges exist in material compatibility and light source suitability for photolithographic applications.
Purpose of the Study:
- To develop novel photo-activated luminescent materials for photolithographic processes.
- To enable direct visualization and rapid evaluation of pattern quality in photoresists.
Main Methods:
- Development of two radical-mediated photoinitiators, oxe02 and oxe03.
- Incorporation of these photoinitiators into photoresist formulations.
- Utilizing ultraviolet (UV) light exposure to activate luminescence.
Main Results:
- The developed photoinitiators are non-luminescent until UV exposure.
- UV exposure triggers photolytic cleavage, generating radicals that initiate luminescence.
- Activated photoinitiators emit strong luminescence, allowing real-time pattern visualization and quality assessment.
Conclusions:
- The study expands the use of photoinitiators in luminescent material systems.
- A viable strategy for real-time monitoring in photolithographic processes is proposed.
- These findings show significant promise for practical applications in advanced manufacturing.
