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Scalable Quantum Integrated Circuits on Superconducting Two-Dimensional Electron Gas Platform
Published on: August 2, 2019
Encapsulation epitaxy of air-stable 2D superconductors for quantum circuits
Xudong Zheng1, Sameia Zaman1,2, Kenan Zhang1
1Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, MA, USA.
Nature
|August 5, 2026
Summary
We developed encapsulation epitaxy for air-stable, large-area monolayer niobium diselenide (1L-NbSe2) superconductors. This method enables integration into superconducting quantum circuits with high kinetic inductance.
Area of Science:
- Condensed Matter Physics
- Materials Science
- Quantum Information Science
Background:
- Two-dimensional (2D) superconductors are crucial for quantum information science and correlated physics.
- Synthesizing large-area, air-stable monolayer 2D superconductors is challenging due to oxidation.
- Existing methods struggle with scalability and air sensitivity, hindering device fabrication.
Purpose of the Study:
- To develop a scalable method for producing air-stable, large-area monolayer niobium diselenide (1L-NbSe2).
- To investigate the potential of 1L-NbSe2 for superconducting quantum circuits.
- To demonstrate the integration of 1L-NbSe2 into functional superconducting devices.
Main Methods:
- 'Encapsulation epitaxy' growth mechanism using 2D materials (graphene, hBN) as protective templates.
- Epitaxial growth of 1L-NbSe2 underneath the encapsulation layer on various substrates.
- Development of oxidation-free transfer and superconducting edge-contact techniques for device integration.
Main Results:
- Achieved large-area ( >1 inch), air-stable 1L-NbSe2 films.
- Demonstrated robust superconductivity (Tc ≈ 1 K) and enhanced charge density waves (TCDW ≈ 177 K) in heterostructures.
- Fabricated superconducting circuits with 1L-NbSe2 exhibiting high kinetic inductance (LK ≈ 0.7 nH □⁻¹).
Conclusions:
- Encapsulation epitaxy provides a viable route for wafer-scale production of air-stable 2D superconductors.
- 1L-NbSe2 is a promising material for superconducting quantum circuits due to its properties and integration compatibility.
- This methodology paves the way for monolithic fabrication of advanced superconducting quantum devices.

