Development of an automatic approaching trigger measurement system based on macro-micro collaborative motion

Area of Science:

• Metrology and Measurement Science
• Precision Engineering
• Nanotechnology

Background:

• The need for high-precision measurement systems capable of large-stroke motion is critical in advanced manufacturing.
• Existing systems face challenges in balancing large movement ranges with nanoscale accuracy.
• Macro-micro cooperative motion offers a potential solution to this contradiction.

Purpose of the Study:

• To develop and validate a novel Fast Automatic Approaching Trigger Measurement System (FAATMS).
• To address the conflict between large-stroke stage movement and high-precision measurement requirements.
• To enable reliable nanoscale triggering for precision measurement tasks.

Main Methods:

• Integration of a large-stroke macrostage (LSMS) with a six-degree-of-freedom microstage (6-DOFMS).
• Implementation of a three-dimensional (3D) motion control and nanoscale triggering strategy with secondary triggering.
• Utilizing laser interferometers for 3D displacement measurement, adhering to the Abbe principle.

Main Results:

• The FAATMS demonstrated excellent repeatability with a peak-to-peak value of 64.9 nm and a standard deviation < 39.1 nm (k=2).
• Micro-nano level measurements on a standard sphere showed a diameter repeatability of 330 nm (k=2).
• The system successfully achieved rapid coarse triggering via LSMS followed by precise secondary triggering via 6-DOFMS.

Conclusions:

• The developed FAATMS effectively solves the contradiction between large-stroke motion and high-precision measurement.
• The system's reliability and accuracy are validated through experimental results on standard spheres.
• FAATMS offers significant advancements for fundamental manufacturing technology and precision measurement applications.