Design and Optimization of High-Amplification-Ratio Micromanipulator Based on Compliant Mechanism

Displacement magnification (DM) is one of the key indicators to measure the performance of a micromanipulator. Based on the principle of triangle amplification, a series of three-stage displacement amplification (DA) micromanipulators is designed in this paper, which is driven by a piezoelectric actuator. The mechanism is composed of a compound rhombus mechanism, a bridge mechanism and two parallelogram mechanisms. The compound rhombus mechanism is located at the front end and has high stiffness characteristics. The bridge mechanism is located at the back end and is connected to the parallelogram mechanism to realize the parallel output of the clamping end. The DM model of the mechanism is established. On this basis, the structural size optimization design is carried out. With the goal of maximizing the DM, the key geometric parameters such as the thickness and length of the hinge and the section size of the key rod are selected as the design variables. Considering the constraints of material strength and input stiffness, the parameters of the micromanipulator are optimized. The correctness of the optimization method is verified by finite element simulation and experimental test. The results show that the DM of the optimized micromanipulator is significantly improved under the premise of maintaining sufficient stiffness, which can effectively guide the performance improvement and structural design of the micromanipulator.