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Updated: Sep 2, 2026

Ohmic Contact Fabrication Using a Focused-ion Beam Technique and Electrical Characterization for Layer Semiconductor Nanostructures
Published on: December 5, 2015
Revisiting the Schottky-Mott Relation for Metal/Transition Metal Dichalcogenide Interfaces: The Role of Interface
Chih-Piao Chuu1, Shu-Jui Chang1, Yu-Miin Sheu2
1Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu30091, Taiwan.
Abstract:
High contact resistance, stemming from Fermi-level pinning (FLP), is a bottleneck in the contact engineering of transition metal dichalcogenide (TMD)-based two-dimensional field-effect transistors (2DFETs). Our study re-examines the nature of FLP in 2D semiconductors, focusing on regimes where the material thickness is commensurate with the interface thickness. By combining first-principles calculations with experimental validation via ultraviolet photoelectron spectroscopy (UPS) and scanning tunneling spectroscopy (STS), we establish the metal effective work function (eWF) as a figure of merit for substantiating the Schottky-Mott relation. Our findings indicate that FLP is governed by both long-range dipole interactions and extended short-range Lennard-Jones potentials. This framework, in conjunction with the linear Schottky-Mott relation, improves predictive capabilities in contact engineering.
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