Single-Pulse Femtosecond Laser 3D Multi-Foci Light-Field Engineering via Multi-Layer Noise Threshold Filtering

Three-dimensional processing is a key trend in micro/nano manufacturing, with widespread applications in photonics, manufacturing, and optical storage. However, simultaneously achieving high fabrication resolution, throughput, and quality for three-dimensional structures remains challenging. Here, we propose a three-dimensional multi-foci light-field shaping and high-throughput micro/nano manufacturing method based on a single pulse. This method combines a multi-layer noise threshold filtering algorithm with a multi-layer over-sampling algorithm to generate a three-dimensional multi-foci light field with up to 5,400 laser foci across six layers using a dual-spatial-light-modulator parallel system. In processing experiments, a representative single-spatial-light-modulator light field contains 1,200 laser foci per pulse. Under the dual-spatial-light-modulator parallel system, this configuration corresponds to 2,400 processing points per incident pulse, enabling a demonstrated processing throughput of 24 000 000 processing points s^-1. In addition, the method achieves an isolated smallest feature of approximately 50 nm and demonstrates high manufacturing flexibility and broad material compatibility across inorganic, organic, and hydrogel materials. This strategy provides a precise, scalable, and efficient route for high-quality three-dimensional micro/nano manufacturing.