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Updated: Oct 25, 2026

Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry
Published on: August 1, 2017
Experimental setup for testing nanocalorimeter sensors as a plasma diagnostics tool
Carles Corbella1,2, Feng Yi1, Andrei Kolmakov3
1Materials Measurement Science Division, MML, NIST, Gaithersburg, Maryland 20899, USA.
Abstract:
The application of microfabricated nanocalorimeters for real-time, highly sensitive, and selective monitoring of the energy fluxes from low-pressure plasma discharges has been reported recently. Here, we describe the experimental setup for complementary characterization of nanocalorimeters' performance using plasma diagnostics techniques. The Langmuir probe, retarding field energy analyzer, optical emission spectroscopy, quadrupole mass spectrometry, and thermocouple-based thermometry constitute the plasma monitor suite. We discuss two application examples of the plasma monitor suite: (1) discrimination between electron- and ion-induced heat fluxes via sensor direct current biasing, and (2) detection of fast temperature transients in pulsed discharges. The main goal of this work is to demonstrate a nanocalorimetry platform as a real-time metrology for plasma processing and process control.
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