Development and validation of a multichannel edge density profile reflectometer embedded in ion cyclotron resonance

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Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
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Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis

Published on: May 10, 2021

Sichun Qiu1,2, Yan Cheng1, Qilong Ren1

  • 1Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei 230031, China.

The Review of Scientific Instruments
|October 29, 2026
PubMed

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