Study on angular and polarization dependence of optical force in multilayered dielectric coatings for optical devices

Recent optical force research has extended from microscopic manipulation to the actuation of macroscopic optical devices, for which multilayered dielectric-coated reflectors provide important platforms for studying optical-force-induced displacement. Such responses are commonly interpreted primarily in terms of incident optical power under near-normal incidence. However, under oblique incidence, the distinct boundary conditions and intralayer electromagnetic-field distributions of TE/TM polarizations cause the optical force distribution to depend on both incidence angle and polarization state. In this study, we investigate a SiO₂/ZrO₂ multilayered dielectric mirror excited by a 527 nm pulsed laser at incidence angles of 15^∘ and 45^∘ under five calibrated polarization states. CWT/ICWT analysis identifies a reproducible high-frequency displacement band at 245-295 kHz. Its interpretation as a characteristic spectral signature of the optical-force-driven mechanical-mode response is supported by the 247.7 kHz reference mechanical frequency and a strongly coupled three-dimensional mode near 246.21 kHz. Across the paired excitation conditions, the peak displacement in this band increases with the corresponding single-pulse energy and is larger at 15^∘ than at 45^∘. The normalized response also exhibits polarization-dependent modulation, with the polarization sensitivity increasing from 5.742% at 15^∘ to 11.727% at 45^∘ and a bootstrap-estimated difference of 5.985% (95% CI: 2.935-8.826%). These results provide experimental evidence for angle- and polarization-dependent optical-force responses in multilayered dielectric mirrors and highlight the importance of controlling incidence angle and polarization in macroscopic optical-force measurements.