Fast reconstruction of tensor tomographic X-ray scattering data for real-time applications
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Updated: Nov 4, 2026

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
André Mesquita Antunes1, Daniël Maria Pelt1, Kees Joost Batenburg1
1Leiden Institute of Advanced Computer Science, Universiteit Leiden, Einsteinweg 55, 2333 CC Leiden, The Netherlands.
Abstract:
X-ray scattering tensor tomography reveals nanoscale structural orientation in 3D, but its reliance on slow iterative reconstruction limits real-time use. We introduce an extension of a direct reconstruction approach for parallel-beam geometries that computes algebraic filters approximating multiple iterative updates with a single filtering and back-projection step. By explicitly separating the tomographic projector from a view-dependent mixing operator, the method generalizes across tensor representations and modes of (small-angle) X-ray scattering measurement. Simulated and experimental results show that the approach approximates iterative reconstructions while reducing computation time by over an order of magnitude, realizing a reconstruction of a 53x53x53x28 tensor volume in 1 second on commercially available hardware. The resulting speed and stability enable high-throughput analysis and open the door to real-time scattering-based imaging.
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