Related Experiment Videos
Fabrication of Au/p-Si Schottky barrier for EBIC study
Microscopy Research and Technique
|September 1, 1994
Abstract:
A simple method for the fabrication of a Au/p-Si Schottky barrier suitable for electron beam induced current (EBIC) study has been developed. The mechanical and electrical properties of the fabricated Au/p-Si Schottky barriers have been tested, and EBIC measurements of the dislocation contrast have been conducted using the fabricated Schottky barriers.