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Updated: Aug 11, 2026

Dry Film Photoresist-based Electrochemical Microfluidic Biosensor Platform: Device Fabrication, On-chip Assay Preparation, and System Operation
Published on: September 19, 2017
Microfabrication and microsensors
1Department of Mechatronics & Precision Engineering, Tohoku University, Sendai, Japan.
Abstract:
In order to fabricate microsensors, a micromachining, microfabrication technique based on LSI technologies has been used. In this paper, useful micromachining techniques are described. Examples of integrated microsensors, such as a pressure sensor including a readout circuit and a multisensor cell for blood gas analysis, are introduced. Microflow control devices, such as microvalve and a micropump for integrated chemical analysis systems, are also described.
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