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Microfabrication and microsensors

S Shoji1, M Esashi

  • 1Department of Mechatronics & Precision Engineering, Tohoku University, Sendai, Japan.

Applied Biochemistry and Biotechnology
|April 1, 1993
PubMed
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Micromachining techniques based on LSI technologies enable the fabrication of integrated microsensors and microfluidic devices. These advancements are crucial for developing sophisticated systems for pressure sensing and blood gas analysis.

Area of Science:

  • Microelectromechanical systems (MEMS)
  • Integrated circuit technology

Background:

  • Microsensors and microfluidic devices are essential components in modern analytical and diagnostic systems.
  • Fabrication of these microscale devices requires advanced micromachining and microfabrication techniques.

Purpose of the Study:

  • To describe useful micromachining techniques for microsensor fabrication.
  • To introduce examples of integrated microsensors and microflow control devices.

Main Methods:

  • Utilizing micromachining and microfabrication techniques.
  • Leveraging large-scale integration (LSI) technologies for device fabrication.

Main Results:

  • Demonstration of integrated microsensors, including a pressure sensor with a readout circuit.

Related Experiment Videos

  • Introduction of a multisensor cell for blood gas analysis.
  • Description of microflow control devices like microvalves and micropumps for integrated chemical analysis systems.

    • Conclusions:

    • Micromachining based on LSI technologies is a viable approach for fabricating complex integrated microsensors and microfluidic systems.
    • The described techniques and devices facilitate the development of advanced chemical analysis and diagnostic platforms.