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Related Experiment Videos

Trace elemental analysis at nanometer spatial resolution by parallel-detection electron energy loss spectroscopy

R D Leapman1, D E Newbury

  • 1Biomedical Engineering and Instrumentation Program, NCRR, National Institutes of Health, Bethesda, Maryland 20892.

Analytical Chemistry
|September 15, 1993
PubMed
Summary

This study introduces a highly sensitive electron energy loss spectroscopy (EELS) method for elemental microanalysis. The technique achieves trace sensitivity at the 10 atomic ppm level, enabling near-single atom detection.

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Physics

Background:

  • Elemental microanalysis is crucial for understanding material composition at the nanoscale.
  • Traditional electron energy loss spectroscopy (EELS) methods face limitations in sensitivity and are affected by detector noise.
  • Scanning transmission electron microscopy (STEM) offers high spatial resolution but requires sensitive analytical techniques.

Purpose of the Study:

  • To develop a highly sensitive EELS technique for elemental microanalysis.
  • To overcome limitations of detector pattern noise in EELS.
  • To achieve trace element detection at the atomic ppm level with high spatial resolution.

Main Methods:

  • Utilizing parallel-detection electron energy loss spectroscopy (EELS) integrated with scanning transmission electron microscopy (STEM).

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  • Employing a field emission source for enhanced signal generation.
  • Implementing a difference spectrum method to minimize detector pattern noise by subtracting sequentially collected energy-shifted spectra.

    • Main Results:

    • Achieved unprecedented sensitivity for elemental microanalysis, detecting signals less than 0.1% of the background.
    • Demonstrated trace sensitivity at the 10 atomic ppm level for various elements (alkaline earths, 3-d transition metals, lanthanides).
    • Attained near-single atom detectability for analytical volumes of approximately 10 nm.

    Conclusions:

    • The developed parallel-detection EELS-STEM technique significantly enhances elemental microanalysis sensitivity.
    • This method enables highly accurate trace element quantification and mapping at the nanoscale.
    • The technique opens new possibilities for analyzing materials with extremely low elemental concentrations.