Microbiosensors using electrodes made in Si-technology

The combination of electrochemical transducers made in silicon technology with chemical and biochemical components has been used to manufacture miniaturized sensor structures. Three different types of sensors have been developed and optimized for practical use; (i) an ion-selective sensor, (ii) a glucose enzyme sensor, (iii) a redox-amplifying sensor for immunosensing. The immunodetection based on the redox recycling of mediator molecules is shown for low and high molecular weight analytes. The sensors have been integrated with miniaturized fluidic components and combined with sensor-related electronics and a common microcontroller.