Preparation of multilayered materials in cross-section for in situ TEM tensile deformation studies

The success of in situ transmission electron microscopy experimentation is often dictated by proper specimen preparation and sample design procedures. We have developed a novel technique permitting the production of tensile specimens of multilayered films in cross-section for in situ deformation studies. Of primary, importance in the development of this technique is the production of an electron transparent micro-gauge section. This micro-gauge section predetermines the position at which plastic deformation, crack nucleation and growth, and failure are observed. In short, we report in detail, a unique combination of specimen preparation procedural steps and the design of a multilayer foil sample. The ability of these procedures to facilitate the success of in situ TEM tensile studies of layered materials in cross-section is demonstrated using a Cu-Zr multilayer foil.