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"Standardless" quantitative electron probe microanalysis with energy-dispersive X-ray spectrometry: is it worth the
D E Newbury1, C R Swyt, R L Myklebust
1National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.
Analytical Chemistry
|June 1, 1995
Summary
Standardless quantitative electron probe X-ray microanalysis using first principles calculations can produce significant errors. This method, tested on NIST standards, showed a broad error distribution from -90% to +150%.
Area of Science:
- Materials Science
- Analytical Chemistry
- Physics
Background:
- Quantitative electron probe X-ray microanalysis (EPMA) typically requires standards for accurate elemental quantification.
- Standardless EPMA methods aim to bypass the need for physical standards by calculating theoretical X-ray intensities.
Purpose of the Study:
- To evaluate the accuracy of a "first principles" standardless quantitative EPMA procedure.
- To assess the reliability of the Desktop Spectrum Analyzer (DSA) software for standardless analysis.
Main Methods:
- Implementation of a "first principles" calculation method for standardless EPMA within the DSA software.
- Experimental validation using X-ray spectra acquired from NIST standard reference materials, research materials, and binary compounds.
Main Results:
- The "first principles" standardless analysis procedure exhibited a broad distribution of relative errors, ranging from -90% to +150%.
- These results indicate significant deviations from expected values for tested materials.
Conclusions:
- Standardless quantitative EPMA based on "first principles" calculations, as implemented in DSA, can yield unacceptably large errors.
- Further development or alternative approaches are necessary for reliable standardless EPMA.