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Chemistry of Materials : a Publication of the American Chemical Society
|
July 28, 2025
Area-Selective Atomic Layer Deposition through Selective Passivation of SiO<sub>2</sub> with a SF<sub>6</sub>/H<sub>2</sub> Plasma
Olaf C A Bolkenbaas, Marc J M Merkx, Nicholas J Chittock, et al.
Journal of Materials Chemistry. C
|
November 25, 2024
Investigation of the atomic layer etching mechanism for Al<sub>2</sub>O<sub>3</sub> using hexafluoroacetylacetone and H<sub>2</sub> plasma
Nicholas J Chittock, Joost F W Maas, Ilker Tezsevin, et al.
Chemistry of Materials : a Publication of the American Chemical Society
|
March 6, 2018
Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
Joseph A Singh, Nick F W Thissen, Woo-Hee Kim, et al.
ACS Nano
|
March 8, 2016
A Process for Topographically Selective Deposition on 3D Nanostructures by Ion Implantation
Woo-Hee Kim, Fatemeh Sadat Minaye Hashemi, Adriaan J M Mackus, et al.
ACS Nano
|
January 23, 2020
Synthesis of a Hybrid Nanostructure of ZnO-Decorated MoS<sub>2</sub> by Atomic Layer Deposition
Il-Kwon Oh, Woo-Hee Kim, Li Zeng, et al.
The Journal of Physical Chemistry. C, Nanomaterials and Interfaces
|
March 25, 2022
Relation between Reactive Surface Sites and Precursor Choice for Area-Selective Atomic Layer Deposition Using Small Molecule Inhibitors
Marc J M Merkx, Athanasios Angelidis, Alfredo Mameli, et al.
Nanotechnology
|
December 5, 2015
Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
Adriaan J M Mackus, Matthieu J Weber, Nick F W Thissen, et al.
The Journal of Chemical Physics
|
May 22, 2024
In situ formation of inhibitor species through catalytic surface reactions during area-selective atomic layer deposition of TaN
Marc J M Merkx, Ilker Tezsevin, Pengmei Yu, et al.
Page
of 2
Search research articles
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Showing results (11-20 of 18) with videos related to
Sort By:
Page
of 2
You have reached the last page of results.
This site can display upto 18 results.
Chemistry of Materials : a Publication of the American Chemical Society
|
July 28, 2025
Area-Selective Atomic Layer Deposition through Selective Passivation of SiO<sub>2</sub> with a SF<sub>6</sub>/H<sub>2</sub> Plasma
Olaf C A Bolkenbaas, Marc J M Merkx, Nicholas J Chittock, et al.
Journal of Materials Chemistry. C
|
November 25, 2024
Investigation of the atomic layer etching mechanism for Al<sub>2</sub>O<sub>3</sub> using hexafluoroacetylacetone and H<sub>2</sub> plasma
Nicholas J Chittock, Joost F W Maas, Ilker Tezsevin, et al.
Chemistry of Materials : a Publication of the American Chemical Society
|
March 6, 2018
Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
Joseph A Singh, Nick F W Thissen, Woo-Hee Kim, et al.
ACS Nano
|
March 8, 2016
A Process for Topographically Selective Deposition on 3D Nanostructures by Ion Implantation
Woo-Hee Kim, Fatemeh Sadat Minaye Hashemi, Adriaan J M Mackus, et al.
ACS Nano
|
January 23, 2020
Synthesis of a Hybrid Nanostructure of ZnO-Decorated MoS<sub>2</sub> by Atomic Layer Deposition
Il-Kwon Oh, Woo-Hee Kim, Li Zeng, et al.
The Journal of Physical Chemistry. C, Nanomaterials and Interfaces
|
March 25, 2022
Relation between Reactive Surface Sites and Precursor Choice for Area-Selective Atomic Layer Deposition Using Small Molecule Inhibitors
Marc J M Merkx, Athanasios Angelidis, Alfredo Mameli, et al.
Nanotechnology
|
December 5, 2015
Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
Adriaan J M Mackus, Matthieu J Weber, Nick F W Thissen, et al.
The Journal of Chemical Physics
|
May 22, 2024
In situ formation of inhibitor species through catalytic surface reactions during area-selective atomic layer deposition of TaN
Marc J M Merkx, Ilker Tezsevin, Pengmei Yu, et al.
Page
of 2