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Materials (Basel, Switzerland)|April 3, 2021
On Relationships between Gas-Phase Chemistry and Reactive Ion Etching Kinetics for Silicon-Based Thin Films (SiC, SiO<sub>2</sub> and Si<sub>x</sub>N<sub>y</sub>) in Multi-Component Fluorocarbon Gas MixturesAlexander Efremov, Byung Jun Lee, Kwang-Ho KwonJournal of Nanoscience and Nanotechnology|May 15, 2015
On the etching characteristics and mechanisms of HfO2 thin films in CF4/O2/Ar and CHF3/O2/Ar plasma for nano-devicesNomin Lim, Alexander Efremov, Geun Young Yeom, et al.Materials (Basel, Switzerland)|December 4, 2020
Plasma Parameters and Etching Characteristics of SiO<sub>x</sub>N<sub>y</sub> Films in CF<sub>4</sub> + O<sub>2</sub> + X (X = C<sub>4</sub>F<sub>8</sub> or CF<sub>2</sub>Br<sub>2</sub>) Gas MixturesYunho Nam, Alexander Efremov, Byung Jun Lee, et al.Materials (Basel, Switzerland)|April 3, 2021
Dry Etching Performance and Gas-Phase Parameters of C<sub>6</sub>F<sub>12</sub>O + Ar Plasma in Comparison with CF<sub>4</sub> + ArNomin Lim, Yeon Sik Choi, Alexander Efremov, et al.Materials (Basel, Switzerland)|July 29, 2023
On Relationships between Plasma Chemistry and Surface Reaction Kinetics Providing the Etching of Silicon in CF<sub>4</sub>, CHF<sub>3</sub>, and C<sub>4</sub>F<sub>8</sub> Gases Mixed with OxygenSeung Yong Baek, Alexander Efremov, Alexander Bobylev, et al.Journal of Nanoscience and Nanotechnology|January 5, 2016
Application of Si and SiO2 Etching Mechanisms in CF4/C4F8/Ar Inductively Coupled Plasmas for Nanoscale PatternsJunmyung Lee, Alexander Efremov, Geun Young Yeom, et al.Journal of Nanoscience and Nanotechnology|January 5, 2016
Silicon Surface Modification Using C4F8+O2 Plasma for Nano-Imprint LithographyJunmyung Lee, Alexander Efremov, Jaemin Lee, et al.Journal of Nanoscience and Nanotechnology|May 15, 2015
Etching characteristics and mechanism of SiN(x) films for nano-devices in CH2F2/O2/Ar inductively coupled plasma: effect of O2 mixing ratioJinyoung Son, Alexander Efremov, Sun Jin Yun, et al.ACS Omega|January 8, 2026
Three-Dimensional Tumor Spheroids of Pancreatic and Colorectal Cancer Cell Lines for High-Throughput Screening of Drug CandidatesMikhail Trofimov, Ilya Bulatov, Ilona Donskaia, et al.Pageof 1