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Applied Optics
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May 14, 2020
Impact of coherence length on the field of view in dark-field holographic microscopy for semiconductor metrology: theoretical and experimental comparisons
Christos Messinis, Vasco T Tenner, Johannes F De Boer, et al.
Optics Express
|
January 6, 2023
Field-position dependent apodization in dark-field digital holographic microscopy for semiconductor metrology
Tamar van Gardingen-Cromwijk, Manashee Adhikary, Christos Messinis, et al.
Optics Express
|
December 31, 2020
Diffraction-based overlay metrology using angular-multiplexed acquisition of dark-field digital holograms
Christos Messinis, Theodorus T M van Schaijk, Nitesh Pandey, et al.
Optics Express
|
November 23, 2021
Aberration calibration and correction with nano-scatterers in digital holographic microscopy for semiconductor metrology
Christos Messinis, Theodorus T M van Schaijk, Nitesh Pandey, et al.
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of 1
Search research articles
Search
Showing results (1-10 of 4) with videos related to
Sort By:
Page
of 1
Applied Optics
|
May 14, 2020
Impact of coherence length on the field of view in dark-field holographic microscopy for semiconductor metrology: theoretical and experimental comparisons
Christos Messinis, Vasco T Tenner, Johannes F De Boer, et al.
Optics Express
|
January 6, 2023
Field-position dependent apodization in dark-field digital holographic microscopy for semiconductor metrology
Tamar van Gardingen-Cromwijk, Manashee Adhikary, Christos Messinis, et al.
Optics Express
|
December 31, 2020
Diffraction-based overlay metrology using angular-multiplexed acquisition of dark-field digital holograms
Christos Messinis, Theodorus T M van Schaijk, Nitesh Pandey, et al.
Optics Express
|
November 23, 2021
Aberration calibration and correction with nano-scatterers in digital holographic microscopy for semiconductor metrology
Christos Messinis, Theodorus T M van Schaijk, Nitesh Pandey, et al.
Page
of 1