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The Review of Scientific Instruments|March 3, 2012
Rhenium ion beam for implantation into semiconductorsT V Kulevoy, N N Gerasimenko, D N Seleznev, et al.The Review of Scientific Instruments|March 5, 2008
Bernas ion source discharge simulationI Roudskoy, T V Kulevoy, S V Petrenko, et al.The Review of Scientific Instruments|March 6, 2014
Development of the ion source for cluster implantationT V Kulevoy, D N Seleznev, A V Kozlov, et al.The Review of Scientific Instruments|March 3, 2016
Molecular ion sources for low energy semiconductor ion implantation (invited)A Hershcovitch, V I Gushenets, D N Seleznev, et al.The Review of Scientific Instruments|March 5, 2008
Status of ITEP decaborane ion source programT V Kulevoy, S V Petrenko, R P Kuibeda, et al.The Review of Scientific Instruments|March 5, 2008
Ion sources for energy extremes of ion implantationA Hershcovitch, B M Johnson, V A Batalin, et al.Pageof 1