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Applied Optics
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December 31, 2005
High-temperature stability multilayers for extreme-ultraviolet condenser optics
Sasa Bajt, Daniel G Stearns
Optics Letters
|
March 28, 2003
Correction of figure errors on optical surfaces by laser-induced contraction of Mo/Si multilayers
Stefan P Hau-Riege, Daniel G Stearns
Applied Optics
|
July 19, 2003
High-performance Mo-Si multilayer coatings for extreme-ultraviolet lithography by ion-beam deposition
Eberhard Spiller, Sherry L Baker, Paul B Mirkarimi, et al.
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of 1
Search research articles
Search
Showing results (1-10 of 3) with videos related to
Sort By:
Page
of 1
Applied Optics
|
December 31, 2005
High-temperature stability multilayers for extreme-ultraviolet condenser optics
Sasa Bajt, Daniel G Stearns
Optics Letters
|
March 28, 2003
Correction of figure errors on optical surfaces by laser-induced contraction of Mo/Si multilayers
Stefan P Hau-Riege, Daniel G Stearns
Applied Optics
|
July 19, 2003
High-performance Mo-Si multilayer coatings for extreme-ultraviolet lithography by ion-beam deposition
Eberhard Spiller, Sherry L Baker, Paul B Mirkarimi, et al.
Page
of 1