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Nanotechnology|September 6, 2012

Wafer scale imprint uniformity evaluated by LSPR spectroscopy: a high volume characterization method for nanometer scale structuresClaus Jeppesen, Daniel Nilsson Lindstedt, Asger Laurberg Vig, et al.

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Nanotechnology|September 6, 2012

Wafer scale imprint uniformity evaluated by LSPR spectroscopy: a high volume characterization method for nanometer scale structuresClaus Jeppesen, Daniel Nilsson Lindstedt, Asger Laurberg Vig, et al.

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