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Microsystems & Nanoengineering
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March 2, 2025
A MEMS grating modulator with a tunable sinusoidal grating for large-scale extendable apertures
Datai Hui, Dongpeng Li, Binbin Wang, et al.
Microsystems & Nanoengineering
|
April 13, 2026
Anchor-induced localized stress evolution and deformation prediction in SOI MEMS structures
Datai Hui, Xiao Meng, Jiaqian Ding, et al.
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Search research articles
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Showing results (1-10 of 2) with videos related to
Sort By:
Page
of 1
Microsystems & Nanoengineering
|
March 2, 2025
A MEMS grating modulator with a tunable sinusoidal grating for large-scale extendable apertures
Datai Hui, Dongpeng Li, Binbin Wang, et al.
Microsystems & Nanoengineering
|
April 13, 2026
Anchor-induced localized stress evolution and deformation prediction in SOI MEMS structures
Datai Hui, Xiao Meng, Jiaqian Ding, et al.
Page
of 1