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Applied Optics
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July 2, 2020
Constrained pupil balance compensation for specific lithographic illuminator settings
Dawei Rui, Huaijiang Yang
Applied Optics
|
April 5, 2017
High-performance laser projection display illumination system based on a diffractive optical element
Chuanyang Liang, Wei Zhang, Dawei Rui, et al.
Applied Optics
|
July 14, 2016
Computational method for simulation of thermal load distribution in a lithographic lens
Xinfeng Yu, Mingyang Ni, Dawei Rui, et al.
Page
of 1
Search research articles
Search
Showing results (1-10 of 3) with videos related to
Sort By:
Page
of 1
Applied Optics
|
July 2, 2020
Constrained pupil balance compensation for specific lithographic illuminator settings
Dawei Rui, Huaijiang Yang
Applied Optics
|
April 5, 2017
High-performance laser projection display illumination system based on a diffractive optical element
Chuanyang Liang, Wei Zhang, Dawei Rui, et al.
Applied Optics
|
July 14, 2016
Computational method for simulation of thermal load distribution in a lithographic lens
Xinfeng Yu, Mingyang Ni, Dawei Rui, et al.
Page
of 1