Diem Nguyen Thi Kieu - JoVE Visualize

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Nanotechnology|February 13, 2024

Enhancing control in spatial atomic layer deposition: insights into precursor diffusion, geometric parameters, and CVD mitigation strategiesThien Thanh Nguyen, Diem Nguyen Thi Kieu, Hao Van Bui, et al.

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Nanotechnology|February 13, 2024

Enhancing control in spatial atomic layer deposition: insights into precursor diffusion, geometric parameters, and CVD mitigation strategiesThien Thanh Nguyen, Diem Nguyen Thi Kieu, Hao Van Bui, et al.

Pageof 1