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Journal of Nanoscience and Nanotechnology|April 28, 2019
Performance of Extreme Ultraviolet Coherent Scattering MicroscopeYoung Woong Kim, Dong Gon Woo, Jinho AhnOptics Express|July 14, 2016
Coherent scattering microscopy as an effective inspection tool for analyzing performance of phase shift maskDong Gon Woo, Jae Uk Lee, Seong Chul Hong, et al.Pageof 1