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Direct Comparison of Hyperspectral Stimulated Raman Scattering and Coherent Anti-Stokes Raman Scattering Microscopy for Chemical Imaging
Published on: April 28, 2022
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Performance of Extreme Ultraviolet Coherent Scattering Microscope
Young Woong Kim1, Dong Gon Woo1, Jinho Ahn1
1Division of Materials Science and Engineering, Hanyang University, 222 Wangsimni-ro, Seongdong-gu, Seoul 04763, Republic of Korea.
Journal of Nanoscience and Nanotechnology
|April 28, 2019
Summary
Coherent scattering microscopy (CSM) is a new technique for extreme ultraviolet lithography (EUVL) mask development. It uses coherent diffractive imaging (CDI) to improve mask resolution for high-volume manufacturing.
Area of Science:
- Semiconductor Manufacturing
- Metrology
- Optics
Background:
- Extreme ultraviolet lithography (EUVL) requires advanced mask technology for high-volume manufacturing.
- Current metrology techniques face challenges in analyzing intricate EUV mask structures.
Purpose of the Study:
- Introduce coherent scattering microscopy (CSM) as an actinic metrology technique for EUV mask development.
- Demonstrate CSM's capability for mask resolution improvement.
Main Methods:
- CSM utilizes coherent diffractive imaging (CDI) principles.
- Mask images are reconstructed mathematically from diffraction patterns.
- CSM analyzes diffraction efficiency and phase information of EUV masks.
Main Results:
- CSM provides detailed analysis of EUV mask characteristics.
- The technique aids in developing novel mask structures for enhanced resolution.
Conclusions:
- CSM is a viable actinic metrology for EUV mask development.
- This technique is crucial for advancing EUVL manufacturing capabilities.
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