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Iucrj|September 7, 2017
Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beamsMika Pflüger, Victor Soltwisch, Jürgen Probst, et al.
Analytical and Bioanalytical Chemistry|October 20, 2014
New reference and test materials for the characterization of energy dispersive X-ray spectrometers at scanning electron microscopesVanessa Rackwitz, Michael Krumrey, Christian Laubis, et al.
Optics Express|July 21, 2015
Extended asymmetric-cut multilayer X-ray gratingsMauro Prasciolu, Anton Haase, Frank Scholze, et al.
Optics Express|November 6, 2019
Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratingsAnalía Fernández Herrero, Mika Pflüger, Jürgen Probst, et al.
Optics Express|November 23, 2021
Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scatteringAnalía Fernández Herrero, Mika Pflüger, Jana Puls, et al.
Optics Express|June 21, 2012
A maximum likelihood approach to the inverse problem of scatterometryMark-Alexander Henn, Hermann Gross, Frank Scholze, et al.
Optics Letters|December 22, 2012
Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometryMark-Alexander Henn, Sebastian Heidenreich, Hermann Gross, et al.
Nanoscale|March 22, 2018
Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescenceVictor Soltwisch, Philipp Hönicke, Yves Kayser, et al.
The Review of Scientific Instruments|February 1, 2023
A new sample chamber for hybrid detection of scattering and fluorescence, using synchrotron radiation in the soft x-ray and extreme ultraviolet (EUV) spectral rangeRichard Ciesielski, Leonhard M Lohr, Analía Fernández Herrero, et al.
Nanotechnology|October 6, 2020
Grazing incidence-x-ray fluorescence for a dimensional and compositional characterization of well-ordered 2D and 3D nanostructuresPhilipp Hönicke, Anna Andrle, Yves Kayser, et al.
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