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Applied Optics|September 22, 2010
Condenser optics, partial coherence, and imaging for soft-x-ray projection lithographyG E Sommargren, L G SeppalaApplied Optics|February 20, 2010
Double-exposure holographic interferometry using commonpath reference wavesG E SommargrenApplied Optics|February 4, 2010
Optical Interpretation of the Merit Function in Grey's Lens Design ProgramL G SeppalaApplied Optics|August 20, 2010
Diffraction of light by an opaque sphere. 2: Image formation and resolution considerationsG E Sommargren, H J WeaverApplied Optics|June 26, 2010
Diffraction of light by an opaque sphere. 1: Description and properties of the diffraction patternG E Sommargren, H J WeaverApplied Optics|September 22, 2010
Front-end design issues in soft-x-ray projection lithographyN M Ceglio, A M Hawryluk, G E SommargrenApplied Optics|November 10, 2010
Fabrication of extreme-ultraviolet point-diffraction interferometer aperture arraysJ P Spallas, R E Hostetler, G E Sommargren, et al.Pageof 2