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Applied Optics|September 22, 2010
Condenser optics, partial coherence, and imaging for soft-x-ray projection lithographyG E Sommargren, L G Seppala
Applied Optics|March 24, 2010
Optical heterodyne profilometryG E Sommargren
Applied Optics|November 6, 2010
Harmonic diffractive lensesD W Sweeney, G E Sommargren
Applied Optics|February 4, 2010
Linear phase microscopyG E Sommargren, B J Thompson
Applied Optics|September 22, 2010
Front-end design issues in soft-x-ray projection lithographyN M Ceglio, A M Hawryluk, G E Sommargren
Applied Optics|November 10, 2010
Fabrication of extreme-ultraviolet point-diffraction interferometer aperture arraysJ P Spallas, R E Hostetler, G E Sommargren, et al.
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