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Updated: Jun 8, 2026

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
10:39

Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating

Published on: October 11, 2016

Condenser optics, partial coherence, and imaging for soft-x-ray projection lithography

G E Sommargren, L G Seppala

    Applied Optics
    |September 22, 2010
    PubMed

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