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Analytical and Bioanalytical Chemistry|October 1, 1995
Simulation of sputter-induced roughness for depth profiling of thin film structuresT Wöhner, G Ecke, H Rössler, et al.
Analytical and Bioanalytical Chemistry|October 1, 1995
Interpretation of sputter depth profiles by mixing simulationsG Kupris, H Rössler, G Ecke, et al.
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