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Scientific Reports
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March 16, 2026
Adaptive reinforcement learning for lithography optimization: a scalable AI-driven solution for next-generation semiconductor manufacturing
Umar Rashid, Fahad Shafique, Hamza Atif, et al.
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of 1
Search research articles
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Showing results (1-10 of 1) with videos related to
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Page
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Scientific Reports
|
March 16, 2026
Adaptive reinforcement learning for lithography optimization: a scalable AI-driven solution for next-generation semiconductor manufacturing
Umar Rashid, Fahad Shafique, Hamza Atif, et al.
Page
of 1