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Micromachines
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November 15, 2018
Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration
Sebastian Uhlig, Matthieu Gaudet, Sergiu Langa, et al.
Nature Communications
|
December 15, 2015
A small-gap electrostatic micro-actuator for large deflections
Holger Conrad, Harald Schenk, Bert Kaiser, et al.
Microsystems & Nanoengineering
|
October 23, 2019
Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers
Bert Kaiser, Sergiu Langa, Lutz Ehrig, et al.
Microsystems & Nanoengineering
|
December 5, 2022
The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers
Bert Kaiser, Hermann A G Schenk, Lutz Ehrig, et al.
Page
of 1
Search research articles
Search
Showing results (1-10 of 4) with videos related to
Sort By:
Page
of 1
Micromachines
|
November 15, 2018
Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration
Sebastian Uhlig, Matthieu Gaudet, Sergiu Langa, et al.
Nature Communications
|
December 15, 2015
A small-gap electrostatic micro-actuator for large deflections
Holger Conrad, Harald Schenk, Bert Kaiser, et al.
Microsystems & Nanoengineering
|
October 23, 2019
Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers
Bert Kaiser, Sergiu Langa, Lutz Ehrig, et al.
Microsystems & Nanoengineering
|
December 5, 2022
The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers
Bert Kaiser, Hermann A G Schenk, Lutz Ehrig, et al.
Page
of 1