Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers
Bert Kaiser1, Sergiu Langa1,2, Lutz Ehrig1
11Fraunhofer-Institute for Photonic Microsystems, 01109 Dresden, Germany.
Microsystems & Nanoengineering
|October 23, 2019
Summary
This study introduces a novel Micro-Electro-Mechanical Systems (MEMS) micro speaker that utilizes chip volume for sound generation. This innovative design achieves a 69 dB sound pressure level, demonstrating potential for advanced audio devices.
Area of Science:
- Acoustics
- Micro-Electro-Mechanical Systems (MEMS)
- Solid-state physics
Background:
- MEMS micro speakers are crucial for smart devices like wearables and hearables.
- Key requirements include high sound pressure, low distortion, and low power consumption for various applications.
- Integration with microelectronics and scalable production are vital for MEMS technology.
Purpose of the Study:
- To present a novel MEMS micro speaker concept based on Nanoscopic Electrostatic Drive.
- To demonstrate sound generation using chip volume instead of surface area.
- To detail the principle, design, fabrication, and initial characterization of the device.
Main Methods:
- Development of an in-plane, electrostatic bending actuator design.
- Fabrication of the MEMS micro speaker.
- Characterization using a standard acoustical test setup with an ear simulator.
Main Results:
- The MEMS micro speaker achieved a sound pressure level of 69 dB at 500 Hz.
- Total harmonic distortion was measured at 4.4%.
- The results validate the proof-of-concept for volume-based sound generation.
Conclusions:
- The Nanoscopic Electrostatic Drive based MEMS micro speaker successfully demonstrates sound generation using chip volume.
- The technology shows potential for improved sound pressure and linearity.
- The presented methods can advance the design and simulation of MEMS devices.
