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Applied Optics
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October 19, 2023
Aberration budget analysis of EUV lithography from the imaging performance of a contact layer in a 5 nm technology node
Zhishu Chen, Lisong Dong, Huwen Ding, et al.
Optics Express
|
July 30, 2025
Impact of mask errors on imaging quality in surface plasmon lithography
Dinghai Rui, LiBin Zhang, Yayi Wei, et al.
Optics Express
|
November 29, 2023
Three-dimensional plasmonic lithography imaging modeling based on the RCWA algorithm for computational lithography
Huwen Ding, Taian Fan, Libin Zhang, et al.
Applied Optics
|
January 16, 2024
Mask correction method for surface plasmon lithography
Le Ma, Libin Zhang, Jianfang He, et al.
Optics Express
|
January 6, 2023
Plasmonic lithography fast imaging model based on the decomposition machine learning method
Huwen Ding, Lihong Liu, Ziqi Li, et al.
Optics Express
|
August 13, 2025
Super-resolution imaging using surface plasmon resonance cavity lithography
Dinghai Rui, LiBin Zhang, Huwen Ding, et al.
Optics Express
|
May 4, 2026
Plasmonic lithography fast imaging model based on the decomposition machine learning method under arbitrary illumination system
Zhenyu Xing, Huwen Ding, Yajuan Su, et al.
Optics Express
|
August 13, 2025
Robustness optimization of superlens imaging structures in surface plasmon lithography
Pengyu Ren, Huwen Ding, Libin Zhang, et al.
Optics Express
|
October 15, 2022
Study on forbidden pitch in plasmonic lithography: taking 365 nm wavelength thin silver film-based superlens imaging lithography as an example
Huwen Ding, Lihong Liu, Lisong Dong, et al.
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of 1
Search research articles
Search
Showing results (1-10 of 9) with videos related to
Sort By:
Page
of 1
Applied Optics
|
October 19, 2023
Aberration budget analysis of EUV lithography from the imaging performance of a contact layer in a 5 nm technology node
Zhishu Chen, Lisong Dong, Huwen Ding, et al.
Optics Express
|
July 30, 2025
Impact of mask errors on imaging quality in surface plasmon lithography
Dinghai Rui, LiBin Zhang, Yayi Wei, et al.
Optics Express
|
November 29, 2023
Three-dimensional plasmonic lithography imaging modeling based on the RCWA algorithm for computational lithography
Huwen Ding, Taian Fan, Libin Zhang, et al.
Applied Optics
|
January 16, 2024
Mask correction method for surface plasmon lithography
Le Ma, Libin Zhang, Jianfang He, et al.
Optics Express
|
January 6, 2023
Plasmonic lithography fast imaging model based on the decomposition machine learning method
Huwen Ding, Lihong Liu, Ziqi Li, et al.
Optics Express
|
August 13, 2025
Super-resolution imaging using surface plasmon resonance cavity lithography
Dinghai Rui, LiBin Zhang, Huwen Ding, et al.
Optics Express
|
May 4, 2026
Plasmonic lithography fast imaging model based on the decomposition machine learning method under arbitrary illumination system
Zhenyu Xing, Huwen Ding, Yajuan Su, et al.
Optics Express
|
August 13, 2025
Robustness optimization of superlens imaging structures in surface plasmon lithography
Pengyu Ren, Huwen Ding, Libin Zhang, et al.
Optics Express
|
October 15, 2022
Study on forbidden pitch in plasmonic lithography: taking 365 nm wavelength thin silver film-based superlens imaging lithography as an example
Huwen Ding, Lihong Liu, Lisong Dong, et al.
Page
of 1