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Applied Optics|June 15, 2012
Parametric uncertainty in nanoscale optical dimensional measurementsJames Potzick, Egon Marx
Applied Optics|August 19, 2007
Images of strips on and trenches in substratesEgon Marx
Journal of Research of the National Bureau of Standards (1977)|September 27, 2021
Size and Refractive Index Determination of Single Polystyrene SpheresEgon Marx, George W Mulholland
Journal of Research of the National Institute of Standards and Technology|February 11, 2017
Certification of SRM1960: Nominal 10 μm Diameter Polystyrene Spheres ("Space Beads")Thomas R Lettieri, Arie W Hartman, Gary G Hembree, et al.
Journal of Research of the National Bureau of Standards (1977)|September 27, 2021
Development of a One-Micrometer-Diameter Particle Size Standard Reference MaterialG W Mulholland, A W Hartman, G G Hembree, et al.
Applied Optics|June 21, 2007
Scatterfield microscopy for extending the limits of image-based optical metrologyRichard M Silver, Bryan M Barnes, Ravikiran Attota, et al.
Journal of Research of the National Institute of Standards and Technology|January 6, 2017
X-Ray Lithography Mask Metrology: Use of Transmitted Electrons in an SEM for Linewidth MeasurementMichael T Postek, Jeremiah R Lowney, Andras E Vladar, et al.
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