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Jilong Lin

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The Review of Scientific Instruments|December 3, 2017
Modular injector integrated linear apparatus with motion profile optimization for spatial atomic layer depositionXiaolei Wang, Yun Li, Jilong Lin, et al.
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The Review of Scientific Instruments|December 3, 2017
Modular injector integrated linear apparatus with motion profile optimization for spatial atomic layer depositionXiaolei Wang, Yun Li, Jilong Lin, et al.
Pageof 1