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Joanna Cheung

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ACS Applied Materials & Interfaces|April 3, 2019
Engineering High- k/SiGe Interface with ALD Oxide for Selective GeO <sub>x</sub> ReductionMahmut S Kavrik, Peter Ercius, Joanna Cheung, et al.
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ACS Applied Materials & Interfaces|April 3, 2019
Engineering High- k/SiGe Interface with ALD Oxide for Selective GeO <sub>x</sub> ReductionMahmut S Kavrik, Peter Ercius, Joanna Cheung, et al.
Pageof 1