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Optics Express
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December 18, 2010
Impacts of cost functions on inverse lithography patterning
Jue-Chin Yu, Peichen Yu
Optics Express
|
March 29, 2012
Fast source optimization involving quadratic line-contour objectives for the resist image
Jue-Chin Yu, Peichen Yu, Hsueh-Yung Chao
IEEE Transactions on Image Processing : a Publication of the IEEE Signal Processing Society
|
March 27, 2013
Library-based illumination synthesis for critical CMOS patterning
Jue-Chin Yu, Peichen Yu, Hsueh-Yung Chao
Page
of 1
Search research articles
Search
Showing results (1-10 of 3) with videos related to
Sort By:
Page
of 1
Optics Express
|
December 18, 2010
Impacts of cost functions on inverse lithography patterning
Jue-Chin Yu, Peichen Yu
Optics Express
|
March 29, 2012
Fast source optimization involving quadratic line-contour objectives for the resist image
Jue-Chin Yu, Peichen Yu, Hsueh-Yung Chao
IEEE Transactions on Image Processing : a Publication of the IEEE Signal Processing Society
|
March 27, 2013
Library-based illumination synthesis for critical CMOS patterning
Jue-Chin Yu, Peichen Yu, Hsueh-Yung Chao
Page
of 1