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Applied Optics|June 4, 2019
3D push-pull heterodyne interferometer for SPM metrologyT V Kazieva, K L Gubskiy, A P Kuznetsov, et al.The Review of Scientific Instruments|March 2, 2021
Accuracy of the interferometric method for Leeb hardness testers calibrationT V Kazieva, K L Gubskiy, I Yu Tischenko, et al.Pageof 1