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Microsystems & Nanoengineering|October 23, 2019
Concept and proof for an all-silicon MEMS micro speaker utilizing air chambersBert Kaiser, Sergiu Langa, Lutz Ehrig, et al.
Microsystems & Nanoengineering|December 5, 2022
The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducersBert Kaiser, Hermann A G Schenk, Lutz Ehrig, et al.
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