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Journal of Micro/Nanolithography, MEMS, and MOEMS : JM3
|
October 31, 2024
Evaluating the Effects of Modeling Errors for Isolated Finite 3D Targets
Mark-Alexander Henn, Bryan M Barnes, Hui Zhou
OSA Continuum
|
December 12, 2019
Data-driven approaches to optical patterned defect detection
Mark-Alexander Henn, Hui Zhou, Bryan M Barnes
Optics Letters
|
November 3, 2016
Optimizing the nanoscale quantitative optical imaging of subfield scattering targets
Mark-Alexander Henn, Bryan M Barnes, Hui Zhou, et al.
Optics Letters
|
December 22, 2012
Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry
Mark-Alexander Henn, Sebastian Heidenreich, Hermann Gross, et al.
Optics Express
|
June 21, 2012
A maximum likelihood approach to the inverse problem of scatterometry
Mark-Alexander Henn, Hermann Gross, Frank Scholze, et al.
Physics in Medicine and Biology
|
June 6, 2024
GPU-accelerated parallel image reconstruction strategies for magnetic particle imaging
Klaus N Quelhas, Mark-Alexander Henn, Ricardo Farias, et al.
Scientific Reports
|
September 22, 2023
Harmonic dependence of thermal magnetic particle imaging
Thinh Q Bui, Mark-Alexander Henn, Weston L Tew, et al.
Light, Science & Applications
|
March 1, 2016
Deep-subwavelength Nanometric Image Reconstruction using Fourier Domain Optical Normalization
Jing Qin, Richard M Silver, Bryan M Barnes, et al.
Journal of Micro/Nanolithography, MEMS, and MOEMS : JM3
|
December 19, 2015
Optimizing Hybrid Metrology: Rigorous Implementation of Bayesian and Combined Regression
Mark-Alexander Henn, Richard M Silver, John S Villarrubia, et al.
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Search research articles
Search
Showing results (1-10 of 9) with videos related to
Sort By:
Page
of 1
Journal of Micro/Nanolithography, MEMS, and MOEMS : JM3
|
October 31, 2024
Evaluating the Effects of Modeling Errors for Isolated Finite 3D Targets
Mark-Alexander Henn, Bryan M Barnes, Hui Zhou
OSA Continuum
|
December 12, 2019
Data-driven approaches to optical patterned defect detection
Mark-Alexander Henn, Hui Zhou, Bryan M Barnes
Optics Letters
|
November 3, 2016
Optimizing the nanoscale quantitative optical imaging of subfield scattering targets
Mark-Alexander Henn, Bryan M Barnes, Hui Zhou, et al.
Optics Letters
|
December 22, 2012
Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry
Mark-Alexander Henn, Sebastian Heidenreich, Hermann Gross, et al.
Optics Express
|
June 21, 2012
A maximum likelihood approach to the inverse problem of scatterometry
Mark-Alexander Henn, Hermann Gross, Frank Scholze, et al.
Physics in Medicine and Biology
|
June 6, 2024
GPU-accelerated parallel image reconstruction strategies for magnetic particle imaging
Klaus N Quelhas, Mark-Alexander Henn, Ricardo Farias, et al.
Scientific Reports
|
September 22, 2023
Harmonic dependence of thermal magnetic particle imaging
Thinh Q Bui, Mark-Alexander Henn, Weston L Tew, et al.
Light, Science & Applications
|
March 1, 2016
Deep-subwavelength Nanometric Image Reconstruction using Fourier Domain Optical Normalization
Jing Qin, Richard M Silver, Bryan M Barnes, et al.
Journal of Micro/Nanolithography, MEMS, and MOEMS : JM3
|
December 19, 2015
Optimizing Hybrid Metrology: Rigorous Implementation of Bayesian and Combined Regression
Mark-Alexander Henn, Richard M Silver, John S Villarrubia, et al.
Page
of 1