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Journal of Micro/Nanolithography, MEMS, and MOEMS : JM3|October 31, 2024
Evaluating the Effects of Modeling Errors for Isolated Finite 3D TargetsMark-Alexander Henn, Bryan M Barnes, Hui ZhouOSA Continuum|December 12, 2019
Data-driven approaches to optical patterned defect detectionMark-Alexander Henn, Hui Zhou, Bryan M BarnesOptics Letters|November 3, 2016
Optimizing the nanoscale quantitative optical imaging of subfield scattering targetsMark-Alexander Henn, Bryan M Barnes, Hui Zhou, et al.Light, Science & Applications|March 1, 2016
Deep-subwavelength Nanometric Image Reconstruction using Fourier Domain Optical NormalizationJing Qin, Richard M Silver, Bryan M Barnes, et al.Journal of Micro/Nanolithography, MEMS, and MOEMS : JM3|December 19, 2015
Optimizing Hybrid Metrology: Rigorous Implementation of Bayesian and Combined RegressionMark-Alexander Henn, Richard M Silver, John S Villarrubia, et al.Applied Optics|September 5, 2012
Improving optical measurement uncertainty with combined multitool metrology using a Bayesian approachNien Fan Zhang, Richard M Silver, Hui Zhou, et al.Applied Optics|October 3, 2013
Fourier domain optical tool normalization for quantitative parametric image reconstructionJing Qin, Richard M Silver, Bryan M Barnes, et al.Measurement Science & Technology|October 31, 2024
Combining model-based measurement results of critical dimensions from multiple toolsNien Fan Zhang, Bryan M Barnes, Hui Zhou, et al.Optics Express|November 13, 2013
Three-dimensional deep sub-wavelength defect detection using λ = 193 nm optical microscopyBryan M Barnes, Martin Y Sohn, Francois Goasmat, et al.Optics Letters|December 22, 2012
Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometryMark-Alexander Henn, Sebastian Heidenreich, Hermann Gross, et al.Pageof 394