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The Review of Scientific Instruments
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April 2, 2009
Adaptive spatially resolving detector for the extreme ultraviolet with absolute measuring capability
Markus Benk, Klaus Bergmann
Optics Letters
|
October 17, 2008
Compact soft x-ray microscope using a gas-discharge light source
Markus Benk, Klaus Bergmann, David Schäfer, et al.
Applied Optics
|
April 22, 2017
Amplitude versus phase effects in extreme ultraviolet lithography mask scattering and imaging
Patrick P Naulleau, Markus Benk, Kenneth A Goldberg, et al.
Page
of 1
Search research articles
Search
Showing results (1-10 of 3) with videos related to
Sort By:
Page
of 1
The Review of Scientific Instruments
|
April 2, 2009
Adaptive spatially resolving detector for the extreme ultraviolet with absolute measuring capability
Markus Benk, Klaus Bergmann
Optics Letters
|
October 17, 2008
Compact soft x-ray microscope using a gas-discharge light source
Markus Benk, Klaus Bergmann, David Schäfer, et al.
Applied Optics
|
April 22, 2017
Amplitude versus phase effects in extreme ultraviolet lithography mask scattering and imaging
Patrick P Naulleau, Markus Benk, Kenneth A Goldberg, et al.
Page
of 1