Adaptive spatially resolving detector for the extreme ultraviolet with absolute measuring capability.
1Fraunhofer Institute for Laser Technology, Steinbachstrasse 15, D-52074 Aachen, Germany. markus.benk@ilt.fraunhofer.de
The Review of Scientific Instruments
|April 2, 2009
Summary
A new detector converts extreme ultraviolet (XUV) and soft x-ray radiation into visible light for imaging. This adaptable system allows precise measurement of XUV sources and optical systems.
Area of Science:
- Optics and Photonics
- X-ray Science
- Detector Technology
Background:
- Characterizing extreme ultraviolet (XUV) and soft x-ray sources and optics requires specialized detection methods.
- Existing detectors may lack the spatial resolution or spectral matching capabilities for certain applications.
Purpose of the Study:
- To present a novel spatially resolving detector for the XUV and soft x-ray spectral region.
- To enable absolute measurement of in-band radiation flux.
- To facilitate the characterization and optimization of XUV sources and optical systems.
Main Methods:
- Conversion of XUV/soft x-ray radiation to visible light using a scintillator crystal.
- Detection of luminescence via a charge-coupled device (CCD) camera and imaging optics.
- Application of single-layer and multilayer coatings for spectral matching.
- System calibration for absolute flux measurements.
Main Results:
- Demonstrated a functional spatially resolving detector for XUV and soft x-ray radiation.
- Showcased adaptability in field of view and spatial resolution.
- Achieved absolute measurement of in-band radiation flux.
- Presented application example of characterizing a soft x-ray microscope focus.
Conclusions:
- The developed detector system is effective for characterizing XUV sources and optical systems.
- The system's adaptability and calibration capabilities make it a valuable tool in XUV/soft x-ray research.
- This technology advances the precise measurement and optimization of advanced light sources.
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