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Optics Express|November 10, 2016
Step beyond Kohler illumination analysis for far-field quantitative imaging: angular illumination asymmetry (ANILAS) mapsRavi Kiran AttotaOptics Express|August 17, 2018
Fidelity test for through-focus or volumetric type of optical imaging methodsRavi Kiran AttotaScientific Reports|March 21, 2018
Enhancing optical microscopy illumination to enable quantitative imagingEmil Agocs, Ravi Kiran AttotaOptics Express|July 14, 2016
Parameter optimization for through-focus scanning optical microscopyRavi Kiran Attota, Hyeonggon KangOptics Letters|June 15, 2017
Optical microscope illumination analysis using through-focus scanning optical microscopyRavi Kiran Attota, Haesung ParkAnalytical and Bioanalytical Chemistry|September 24, 2016
Volume determination of irregularly-shaped quasi-spherical nanoparticlesRavi Kiran Attota, Eileen Cherry LiuOptics Express|July 28, 2016
Feasibility study on 3-D shape analysis of high-aspect-ratio features using through-focus scanning optical microscopyRavi Kiran Attota, Peter Weck, John A Kramar, et al.Measurement Science & Technology|May 17, 2019
Nondestructive shape process monitoring of three-dimensional high aspect ratio targets using through-focus scanning optical microscopyRavi Kiran Attota, Hyeonggon Kang, Keana Scott, et al.Journal of Vacuum Science and Technology. B, Nanotechnology & Microelectronics : Materials, Processing, Measurement, & Phenomena : JVST B|June 16, 2021
Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopyMin-Ho Rim, Emil Agocs, Ronald Dixson, et al.Pageof 1